Characterization of phosphorus donors in silicon by low magnetic field electrically detected magnetic resonance

dc.contributor.authorMorishita, Hiroki / 森下, 弘樹en_US
dc.date.accessioned2014-05-09T07:08:55Z
dc.date.available2014-05-09T07:08:55Z
dc.date.issued2011-03-23en_US
dc.description博士(工学), 2010, 基礎理工学en_US
dc.identifier.urihttp://iroha.scitech.lib.keio.ac.jp:8080/sigma/handle/10721/2473
dc.publisher慶應義塾大学理工学研究科en_US
dc.subjectリンドナーja
dc.subjectシリコンja
dc.subject電気的磁気共鳴検出ja
dc.subject低磁場ja
dc.subjectphosphorus donoren
dc.subjectsiliconen
dc.subjectelectrically detected magnetic resonanceen
dc.subjectlow-magnetic fielden
dc.titleCharacterization of phosphorus donors in silicon by low magnetic field electrically detected magnetic resonanceen_US
dc.title.alternative低磁場電気検知磁気共鳴によるシリコン中のリン不純物評価en_US
dc.type学位論文en_US

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