Characterization of phosphorus donors in silicon by low magnetic field electrically detected magnetic resonance
dc.contributor.author | Morishita, Hiroki / 森下, 弘樹 | en_US |
dc.date.accessioned | 2014-05-09T07:08:55Z | |
dc.date.available | 2014-05-09T07:08:55Z | |
dc.date.issued | 2011-03-23 | en_US |
dc.description | 博士(工学), 2010, 基礎理工学 | en_US |
dc.identifier.uri | http://iroha.scitech.lib.keio.ac.jp:8080/sigma/handle/10721/2473 | |
dc.publisher | 慶應義塾大学理工学研究科 | en_US |
dc.subject | リンドナー | ja |
dc.subject | シリコン | ja |
dc.subject | 電気的磁気共鳴検出 | ja |
dc.subject | 低磁場 | ja |
dc.subject | phosphorus donor | en |
dc.subject | silicon | en |
dc.subject | electrically detected magnetic resonance | en |
dc.subject | low-magnetic field | en |
dc.title | Characterization of phosphorus donors in silicon by low magnetic field electrically detected magnetic resonance | en_US |
dc.title.alternative | 低磁場電気検知磁気共鳴によるシリコン中のリン不純物評価 | en_US |
dc.type | 学位論文 | en_US |
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