Dynamic Characteristics of a MEMS-based Hydraulic Displacement Amplification Mechanism Using Totally Encapsulated Liquid
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Date
2010-09-21
Authors
Journal Title
Journal ISSN
Volume Title
Publisher
慶應義塾大学理工学研究科
Abstract
Description
修士（工学）, 2010, 総合デザイン工学専攻
Keywords
変位増幅, 液体封入, MEMS, displacement amplification, liquid encapsulation, MEMS