Dynamic Characteristics of a MEMS-based Hydraulic Displacement Amplification Mechanism Using Totally Encapsulated Liquid

dc.contributor.advisor	三木, 則尚 / 専任講師
dc.contributor.author	AROUETTE, XAVIER A / アルエット, グザビエ
dc.date.accessioned	2014-05-16T01:11:57Z
dc.date.available	2014-05-16T01:11:57Z
dc.date.issued	2010-09-21
dc.description	修士（工学）, 2010, 総合デザイン工学専攻
dc.identifier.uri	/sigma_local/handle/10721/5247
dc.publisher	慶應義塾大学理工学研究科
dc.subject	変位増幅	ja
dc.subject	液体封入	ja
dc.subject	MEMS	ja
dc.subject	displacement amplification	en
dc.subject	liquid encapsulation	en
dc.subject	MEMS	en
dc.title	Dynamic Characteristics of a MEMS-based Hydraulic Displacement Amplification Mechanism Using Totally Encapsulated Liquid
dc.title.alternative	Dynamic Characteristics of a MEMS-based Hydraulic Displacement Amplification Mechanism Using Totally Encapsulated Liquid
dc.type	学位論文

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