| dc.contributor.author |
Noborisaka, Mayui / 登坂, 万結 |
en_US |
| dc.date.accessioned |
2014-05-09T07:09:30Z |
|
| dc.date.available |
2014-05-09T07:09:30Z |
|
| dc.date.issued |
2013-03-23 |
en_US |
| dc.identifier.uri |
http://iroha.scitech.lib.keio.ac.jp:8080/sigma/handle/10721/2625 |
|
| dc.description |
博士（工学）, 2012, 開放環境科学専攻 |
en_US |
| dc.publisher |
慶應義塾大学理工学研究科 |
en_US |
| dc.subject |
大気圧プラズマ |
ja |
| dc.subject |
DLC |
ja |
| dc.subject |
シリカ |
ja |
| dc.subject |
薄膜 |
ja |
| dc.subject |
化学蒸着 |
ja |
| dc.subject |
Atmospheric pressure plasma |
en |
| dc.subject |
DLC |
en |
| dc.subject |
silica |
en |
| dc.subject |
thin film |
en |
| dc.subject |
CVD |
en |
| dc.title |
Amorphous Carbon and Silica-based Films Synthesized by Atmospheric Pressure Plasma CVD Method |
en_US |
| dc.title.alternative |
大気圧プラズマ化学蒸着法で作製した非晶質炭素膜とシリカ系薄膜 |
en_US |
| dc.type |
学位論文 |
en_US |
