One-side-electrode-type fluid-based inclination sensor combined with CMOS detection circuitry
Loading...
Date
2009-03-23
Journal Title
Journal ISSN
Volume Title
Publisher
慶應義塾大学理工学研究科
Abstract
Description
博士（工学）, 2008, 基礎理工学
Keywords
inclinometer, surface tensioning, capacitance, sensor, su-8, PDMS