セラミックス窒化物薄膜の創製および微細構造制御

dc.contributor.authorHasegawa, Hiroyuki / 長谷川, 裕之en_US
dc.date.accessioned2014-05-09T07:07:10Z
dc.date.available2014-05-09T07:07:10Z
dc.date.issued2005-03-23en_US
dc.description博士(工学), 2004, 基礎理工学専攻en_US
dc.identifier.urihttp://iroha.scitech.lib.keio.ac.jp:8080/sigma/handle/10721/1912
dc.languagejpnen_US
dc.publisher慶應義塾大学理工学研究科en_US
dc.subject微細構造ja
dc.subject微小硬度ja
dc.subject相変態ja
dc.subject格子定数ja
dc.subject準安定相ja
dc.subjectMicrostructureen
dc.subjectMicrohardnessen
dc.subjectPhase transformationen
dc.subjectLattice Parameteren
dc.subjectMetastable Phaseen
dc.titleセラミックス窒化物薄膜の創製および微細構造制御en_US
dc.title.alternativeSynthesis and micro structural controls of ceramics nitride films.en_US
dc.type学位論文en_US

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